Solution of the problem of interaction between capacitive coupled radio-frequency discharge and a sample

11th International Conference on "Mesh methods for boundary-value problems and applications"

Chebakova, V.Ju.^1 ; Gaisin, A.F.^2 ; Zheltukhin, V.S.^3

Kazan Federal University, 18 Kremlevskaya Street, Kazan

420008, Russia^1

Tupolev's Kazan National Research Technical University, Karl Marx St. 10, Kazan

420111, Russia^2

Kazan State Technological University, 68 Karl Marx Street, Kazan

420015, Russia^3

关键词: Gas temperature;    Harmonic voltages;    Initial-boundary value problems;    Local approximation;    Metastable atoms;    Nonlinear problems;    Radio frequencies;    Radio frequency discharges;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/158/1/012024/pdf
DOI  :  10.1088/1757-899X/158/1/012024

来源: IOP

【 摘 要 】

The numerical study of interaction between the capacitive coupled radio frequency (CCRF) discharge and materials is performed. A nonlinear problem, which includes initialboundary value problems for electron, ion, neutral atom, metastable atom, gas temperature and Poisson's equation is solved. A harmonic voltage on the loaded electrodes and Ohm's law for the sample is assumed. A results of calculations of the model problem at pressure p=760 Torr, frequency of generator f=13.76 MHz in local approximation are presented.