Ultrahigh vacuum holder-positioner for in situ studies of conductive nanostructures in a wide temperature range

7th International Scientific and Research Conference "Topical Issues in Aeronautics and Astronautics"

航空航天工程

Shevtsov, D.V.^1,2 ; Lyaschenko, S.A.^1,2 ; Varnakov, S.N.^1,2

Reshetnev Siberian State Aerospace University, Krasnoyarsk

660037, Russia^1

Kirensky Institute of Physics, Federal Research Center KSC SB RAS, Krasnoyarsk

660036, Russia^2

关键词: Conductive nanostructure;    High vacuum systems;    Maintaining temperatures;    Optical methods;    Process chambers;    Sample cooling;    Temperature range;    Wide temperature ranges;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/155/1/012028/pdf
DOI  :  10.1088/1757-899X/155/1/012028

学科分类：航空航天科学

来源: IOP

【 摘 要 】

A holder-positioner was developed in order to be used in high vacuum systems designed for synthesis and in situ samples investigation by optical methods in 77±1171 K temperature range. During tests of holder- positioner the designed system demonstrated independence from other process chamber components, compactness, a large number of the sample degrees of freedom and the stability of maintaining temperatures in the range from 77 to 1171 K with a maximum sample cooling rate about 0.1 K/s.