Automotive MEMS sensors based on additive technologies

1st International Telecommunication Conference "Advanced Micro- and Nanoelectronic Systems and Technologies"

无线电电子学

Vasiliev, A.A.^1,4 ; Sokolov, A.V.^4 ; Pisliakov, A.V.^4 ; Oblov, K Yu^2 ; Samotaev, N.N.^2 ; Kim, V.P.^3 ; Tkachev, S.V.^3 ; Gubin, S.P.^3 ; Potapov, G.N.^4 ; Kokhtina, Yu V^4 ; Nisan, A.V.^4

National Research Center kurchatov Institute, Akademika Kurchatova pl. 1, Moscow

123182, Russia^1

National Research Nuclear University, MEPhI (Moscow Engineering Physics Institute), Kashirskoe shosse 31, Moscow

115409, Russia^2

AkKo Lab LLC, Gilyarovsky str. 65/1, Moscow

129110, Russia^3

Ostec Enterprise Ltd., Moldavskaya str. 5/2, Moscow

121467, Russia^4

关键词: Additive technology;    Aerosol jet printings;    Gas flow meters;    Gas sensitive elements;    General applications;    High temperature;    Sensor technologies;    Thin ceramic films;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/151/1/012024/pdf
DOI  :  10.1088/1757-899X/151/1/012024

来源: IOP

【 摘 要 】

The application of MEMS devices is one of the recent trends in sensor technology. However, traditional silicon MEMS have some intrinsic limitations, when applied to the monitoring of high temperature/high humidity processes. Thin ceramic films of alumina, zirconia or LTCC fixed on rigid frame made of the same ceramic material in combination with ink and aerosol jet printing of functional materials (heaters, temperature, pressure, gas sensitive elements) provides a cheap, flexible, and high-performance alternative for silicon MEMS devices used as gas sensors, gas flowmeters, lambda probes, bolometric matrices for automotive and general application.