Effect of geometrical dimensions on the tribomechanical response of a gold micromembrane with bent beam hinges

7th International Conference on Advanced Concepts in Mechanical Engineering

Pustan, M.^1 ; Dudescu, C.^2 ; Birleanu, C.^1 ; Rusu, F.^1 ; Chiorean, R.^2 ; Craciun, S.^1

Mechanical Systems Engineering Department, Technical University of Cluj-Napoca, Romania^1

Mechanical Engineering Department, Technical University of Cluj-Napoca, Romania^2

关键词: Contact surface;    Experimental and numerical analysis;    Experimental test;    Flexible plates;    Geometrical dimensions;    Mechanical force;    Micro-components;    Restoring forces;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/147/1/012022/pdf
DOI  :  10.1088/1757-899X/147/1/012022

来源: IOP

【 摘 要 】

The scope of this paper is experimental and numerical analysis of micromembranes supported by bent beam hinges fabricated from gold in different geometrical dimensions. The experimental tests are performed using an atomic force microscope in order to determine the micromembrane behaviour under a mechanical force. One of the main application of movable microcomponents is MEMS switching application where the flexible plate is directly deflected to substrate in order to close a circuit. Adhesion between the mobile plate and substrate depends on the roughness of the contact surfaces and is influenced by the micromembrane stiffness based on the restoring force. As the dimensions of hinges increases, the stiffness of micromembrane increases and the adhesion between mobile plate and substrate decreases, respectively.