Synthis and Phisical And Chemical; Properties of SiO2 - B2O3 and SiO2 - P2O5 Thin Film Systems and Powders

7th International Scientific Practical Conference "Innovative Technologies in Engineering"

Mal'Chik, A.G.^1 ; Litovkin, S.V.^1 ; Seregin, V.I.^2 ; Rodionov, P.V.^1 ; Kryuchkova, S.O.^1

Yurga Institute of Technology (Affiliate), National Research Tomsk Polytechnic University, ul. Leningradskaya 26, Yurga

652055, Russia^1

Bauman Moscow State Technical University, ul. Baumanskaya 2-ya, 5/1, Moscow

105005, Russia^2

关键词: Binary oxides;    Chemical process;    Film forming solution;    Film-forming solutions;    Thin film systems;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/142/1/012066/pdf
DOI  :  10.1088/1757-899X/142/1/012066

来源: IOP

【 摘 要 】

The SiO2- B2O3and SiO2- P2O5films were synthesized by using film forming solutions having a P2O5content of up to 30% and B2O3up to 40%. Properties of the filmforming solutions and binary oxides were examined. The physical and chemical processes occurring in the solution during the heat treatment of films were examined. The conditions for producing films of different thicknesses were determined. The kinetic parameters were calculated.