Multilayer Coating Formation at the Deposition from Plasma

International Conference on Advanced Materials and New Technologies in Modern Materials Science 2015

Shanin, S.A.^1 ; Knyazeva, A.G.^1

National Research Tomsk Polytechnic University, Lenin Avenue 30, Tomsk

634050, Russia^1

关键词: Coating compositions;    Equilibrium problem;    Multi-layer-coating;    Numerical experiments;    Physical and mechanical properties;    Stress field;    Transfer process;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/116/1/012003/pdf
DOI  :  10.1088/1757-899X/116/1/012003

来源: IOP

【 摘 要 】

The numerical experiment was carried out for the process of the coating composition formation during deposition from plasma. The chemical reactions between elements are taken into account. The nonuniform composition of the coating is determined by various transfer processes, including diffusion under stress action. To find the stress field the equilibrium problem was solved numerically because all physical and mechanical properties depend on composition. Stress field has been also obtained nonuniform.