Fabrication of high-k dielectric Calcium Copper Titanate (CCTO) target by solid state route

5th National Conference on Processing and Characterization of Materials

Tripathy, N.^1 ; Das, K.C.^1 ; Ghosh, S.P.^1 ; Bose, G.^2 ; Kar, J.P.^1

Department of Physics and Astronomy, National Institute of Technology, Rourkela

769008, India^1

FST, IFHE University, Hyderabad

501203, India^2

关键词: Calcium copper titanates;    Ceramic;    Ceramic pellets;    Microelectronic applications;    Morphological characterization;    Phase formations;    Solid-state routes;    Sputtering target;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/115/1/012022/pdf
DOI  :  10.1088/1757-899X/115/1/012022

来源: IOP

【 摘 要 】

CaCu3Ti4O12(CCTO) ceramic pellet of 10mm diameter has been synthesized by adopting solid state route. The structural and morphological characterization of the ceramics sample was carried out by X-ray diffraction (XRD) and scanning electron microscope (SEM), respectively. XRD pattern revealed the CCTO phase formation, where as SEM micrograph shows the sample consisting of well defined grain and grain boundaries. The room temperature dielectric constant of the sample was found to be ∼ 5000 at 1kHz. After successful preparation of CCTO pellet, a 2 inch diameter CCTO sputtering target is also fabricated in order to deposit CCTO thin films for microelectronic applications.