The effect of Si content on structure and mechanical features of silicon-containing calcium-phosphate-based films deposited by RF-magnetron sputtering on titanium substrate treated by pulsed electron beam

3rd International Youth Conference on Interdisciplinary Problems of Nanotechnology, Biomedicine and Nanotoxicology

物理学;医药卫生;生态环境科学

Surmeneva, M.^1 ; Tyurin, A.^2 ; Mukhametkaliyev, T.^1 ; Teresov, A.^3 ; Koval, A.^3 ; Pirozhkova, T.^2 ; Shuvarin, I.^2 ; Chudinova, E.^1 ; Surmenev, R.^1,4

Tomsk Polytechnic University, Institute of Physics and Technologies, Lenina ave. 30, Tomsk

634050, Russia^1

Derzhavin Tambov State University, Sovetskaya, 93, Tambov

392000, Russia^2

Institute of High-Current Electronics, Siberian Branch, Russian Academy of Sciences, Tomsk

634040, Russia^3

Fraunhofer Institute for Interfacial Engineering and Biotechnology IGB, Nobelstraße 12, Stuttgart

70569, Germany^4

关键词: Amorphous structures;    Mechanical feature;    Mechano-chemical activation;    Pulsed electron beams;    Radio frequency magnetron sputtering;    rf-Magnetron sputtering;    Silicon contents;    Titanium substrates;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/98/1/012028/pdf
DOI  :  10.1088/1757-899X/98/1/012028

来源: IOP

【 摘 要 】

Silicon-containing calcium phosphate (Si-CaP) coatings were fabricated by radio frequency (rf) magnetron sputtering using the targets prepared from hydroxyapatite (HA) powder with different silicon content. A powder of Si-HA (Ca10(PO4)6-x(SiO4)x(OH)2-x, x=0.5 and 1.72) was prepared by mechanochemical activation and then used as a precursor-powder to prepare a target for sputtering. The titanium substrate was acid etched and treated with pulsed electron beam with an energy density of 15 J/cm2. The average crystallite size as determined by XRD was 28 nm for the coatings obtained using the target prepared from the Si-HA powder (x=0.5), whereas Si-CaP (Si-HA powder x=1.72) films showed an amorphous structure. The nanohardness and the Young's modulus of the Si-CaP coating (x=0.5) deposited on titanium treated by pulsed electron beam are enhanced to 4.5 and 113 GPa compared to titanium substrate. Increase of Si content resulted in a dramatic decrease of the nanohardness and Young's modulus of Si-CaP films. However, Si-CaP coatings with the highest Si content revealed significantly lower values of elastic modulus, but slightly higher values of H/E and H3/E2than did the non-coated specimens. Rf-magnetron sputtering allowed us to produce Si- CaP coatings with higher nanohardness and lower elastic modulus compared to titanium substrate.