Micromachining Lithium Niobate for Rapid Prototyping of Resonant Biosensors

27th International Conference on CADCAM, Robotics and Factories of the Future 2014

工业技术;机械制造

Al-Shibaany, Zeyad Yousif Abdoon^1 ; Hedley, John^1 ; Huo, Dehong^1 ; Hu, Zhongxu^1

School of Mechanical and Systems Engineering, Newcastle University, United Kingdom^1

关键词: Biosensor design;    High-precision CNC;    MEMS applications;    Micromachining process;    Optical surfaces;    Optimum conditions;    Piezoelectric property;    Strained surfaces;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/65/1/012030/pdf
DOI  :  10.1088/1757-899X/65/1/012030

学科分类：工业工程学

来源: IOP

【 摘 要 】

Lithium niobate material is widely used in MEMS application due to its piezoelectric properties. This paper presents the micromachining process of lithium niobate to rapid prototype a resonant biosensor design. A high precision CNC machine was used to machine a sample of lithium niobate material at 5 different spindle speeds to find out the best conditions to machine this brittle material. A qualitative visual check of the surface was performed by using scanning electron microscopy, surface roughness was quantitatively investigated using an optical surface profiler and Raman spectroscopy to check the strain of the surface. Results show that the surface quality of the lithium niobate was significantly affected by the spindle speed with optimum conditions at 70k rpm giving a strained surface with 500 nm rms roughness.