The optical and electrical characteristics of PMMA film prepared by spin coating method

2015 Global Conference on Polymer and Composite Materials

材料科学;化学

Zhang, H.Q.^1,2 ; Jin, Y.^1,2 ; Qiu, Y.^1

School of Physics and Optoelectronic Engineering, Dalian University of Technology, Dalian

116024, China^1

Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian

116024, China^2

关键词: Dielectric constant values;    Electrical characteristic;    Glass structure;    High frequency capacitance;    Indium tin oxide;    Insulator layer;    Poly(methyl methacrylate) (PMMA);    Spin-coating method;   

Others  :  https://iopscience.iop.org/article/10.1088/1757-899X/87/1/012032/pdf
DOI  :  10.1088/1757-899X/87/1/012032

学科分类：材料科学（综合）

来源: IOP

【 摘 要 】

Thin films of poly (methyl methacrylate) (PMMA) were prepared on n-Si substrate and indium tin oxide (ITO) glass was prepared by spin coating. High frequency capacitance- voltage (C-V) and current-voltage (I-V) characterization were carried out on the Al/PMMA/n- Si and Al/PMMA/ITO glass structures, with the films as the insulator layer to evaluate the electrical properties. For the PMMA, the dielectric constant value obtained was about 3.9 at 1 MHz. The breakdown field strength of PMMA can be influenced by the impurities and surface charges or the interface states in the Si substrate. The average transmittance value of the PMMA/ITO glass layer was above 80% in the visible range.