Low-energy electron interactions with chromium hexacarbonyl Cr(CO)6

30th International Conference on Photonic, Electronic, and Atomic Collisions

Khreis, J.^2 ; Ameixa, J.^1 ; Neustetter, M.^2 ; Reitshammer, J.^2 ; Ferreira Da Silva, F.^1 ; Denifl, S.^2

Laboratório de Colisões Atómicas e Moleculares, CEFITEC, Departamento de Física, Faculdade de Ciências e Tecnologia, Universidade NOVA de Lisboa, Campus de Caparica, Caparica

2829-516, Portugal^1

Institut für Ionenphysik und Angewandte Physik, Leopold-Franzens Universität Innsbruck, Technikerstraße 25, Innsbruck

6020, Austria^2

关键词: Chromium hexacarbonyl;    Fragmentation patterns;    Ion formation;    Low energy electrons;    Nanoscale structure;    Precursor molecules;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/875/7/062003/pdf
DOI  :  10.1088/1742-6596/875/7/062003

来源: IOP

【 摘 要 】

Synopsis Positive and negative ion formation upon low energy electron interaction with chromium hexacarbonyl precursor molecules used in FEBID applications was studied. The obtained results revealed a noteworthy different fragmentation pattern compared to other precursors. This work contributes to the development and the possible production concerning highly pure nanoscale structures.