The influence of the discharge current axial component on the magnetic field distribution in the cathode region of magnetron sputtering system

24th International Conference on Vacuum Technique and Technology

Goncharov, V.D.^1 ; Sorokin, K.S.^1 ; Fiskin, E.M.^2

Saint Petersburg Electrotechnical University, LETI, Laboratory of Electric Impulsive Technologies, Saint Petersburg

197376, Russia^1

Irkutsk State Technical University, Russia^2

关键词: Axial components;    Cathode surface;    Current component;    Discharge currents;    Magnetic field distribution;    Magnetron discharges;    Magnetron sputtering systems;    Sputtering systems;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012046/pdf
DOI  :  10.1088/1742-6596/872/1/012046

来源: IOP

【 摘 要 】

The paper includes the description of the mathematical model, which simulates magnetic field distribution in the cathode area of the sputtering system discharge considering the current created by electrons moving along the surface of cathode-target. Presented results of the numerical modeling were received using the developed model. It is also shown that the current component, directed along the cathode surface significantly impacts total magnetic field distribution in the magnetron discharge.