Improvement of the measurement accuracy of the spectral method for evaluation parameters of the optically transparent thin films

24th International Conference on Vacuum Technique and Technology

Uhov, A.A.^1 ; Kostrin, D.K.^1 ; Gerasimov, V.A.^1 ; Selivanov, L.M.^1 ; Simon, V.A.^1

Department of Electronic Instruments and Devices, Saint Petersburg Electrotechnical University, LETI, Saint Petersburg

197376, Russia^1

关键词: Deposited coatings;    Envelope curve;    Evaluation parameters;    Interference oscillations;    Measurement accuracy;    Spectral data;    Spectral methods;    Transparent thin film;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012044/pdf
DOI  :  10.1088/1742-6596/872/1/012044

来源: IOP

【 摘 要 】

In this paper the ways of increasing the measurement accuracy of the parameters of the optically transparent thin films using the spectral method are described. The proposed plotting of the envelope curves for the minima and maxima of the interference oscillations in a film and additional filtering of the spectral data, allows improving the accuracy of determining the extrema position and, consequently, increasing the accuracy of the thickness measurements of the deposited coatings.