Research of mechanical stresses in micromechanical structures based on silicon carbide films produced by magnetron sputtering

24th International Conference on Vacuum Technique and Technology

Mikhailova, O.N.^1 ; Korlyakov, A.V.^1 ; Lagosh, A.V.^1

Saint Petersburg State Electrotechnical University, Saint Petersburg

197376, Russia^1

关键词: Curvature radii;    Measurements of;    Mechanical stress;    Micromechanical structures;    SiC films;    Silicon carbide films;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012043/pdf
DOI  :  10.1088/1742-6596/872/1/012043

来源: IOP

【 摘 要 】

Investigations of the effect of residual atmosphere in the magnetron chamber on the mechanical stresses and the shape of micromechanical structure based on SiC film are discussed. Measurements of the curvature radius of SiC micromechanical structure deflection are presented.