The method of controlling the thickness of the deposited film on the basis of the surface plasmon resonance effect

24th International Conference on Vacuum Technique and Technology

Komlev, A.E.^1 ; Dyukin, R.V.^2 ; Shutova, E.S.^1

Department of Physical Electronics and Technology, St. Petersburg State Electrotechnical University, Prof. Popov St. 5, St. Petersburg, Russia^1

JSC LOMO, Chugunnaya St. 20, St. Petersburg, Russia^2

关键词: Deposited films;    Different thickness;    Frequency changes;    High-accuracy;    In-vacuum;    Nano scale;    Surface plasmon resonance effects;    Thin films deposition;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012042/pdf
DOI  :  10.1088/1742-6596/872/1/012042

来源: IOP

【 摘 要 】

New method, based on surface plasmon resonance, for thickness control of thin films deposition in vacuum is offered by authors. This method allows to determine with high accuracy thickness of nanoscale optical coatings. Numerical simulation of surface plasmon resonance conditions in Kretchman geometry and it's frequency changes during deposition of different thickness Ta2O5films are presented. Modeling was given in WinSpall program.