About possibility of detecting micron-size defects in layered structures using the method of microfocus tomography

24th International Conference on Vacuum Technique and Technology

Bessonov, V.B.^1 ; Obodovskiy, A.V.^1 ; Gryaznov, A.Y.^1 ; Klonov, V.V.^1 ; Larionov, I.A.^1 ; Osokin, V.M.^2

Saint Petersburg Electrotechnical University IETI, Saint-Petersburg

197022, Russia^1

Perm National Research Polytechnic University, Perm

614990, Russia^2

关键词: Detecting defects;    Layered Structures;    Micro focus;    Micron size;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012036/pdf
DOI  :  10.1088/1742-6596/872/1/012036

来源: IOP

【 摘 要 】

The paper describes the experience of detecting defects in layered structures using microfocus tomography. The basic features of the equipment for microfocus tomography are given. The sizes of defects (pores and inclusions) and their location in the object are analyzed.