Vacuum coating system for deposition of superconducting W x Si(1_x) ultrathin films used in single photon detectors

24th International Conference on Vacuum Technique and Technology

Vasilev, D.D.^1 ; Malevannaya, E.I.^1 ; Moiseev, K.M.^1

Bauman Moscow State Technical University, 2-nd Baumanskaya str. 5/1, Moscow

105005, Russia^1

关键词: Magnetron co-sputtering;    Research results;    Single-photon detectors;    Technological feature;    Thin films deposition;    Two sources;    Vacuum coating system;    Vacuum system;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012027/pdf
DOI  :  10.1088/1742-6596/872/1/012027

来源: IOP

【 摘 要 】

VUP-11M coating system for thin films deposition in vacuum is described in this article. Technological features which appear at laboratory vacuum system modernization for implementation of dual-components WxSi(1-x)films forming process by means of magnetron co-sputtering from two sources are shown. Totals of the system modernization and research results of obtained WxSi(1-x)films are reported.