Influence of ion bombardment of a substrate on the quality of vacuum-plasma Ti-TiN coatings

24th International Conference on Vacuum Technique and Technology

Shekhtman, S.R.^1 ; Migranov, M. Sh.^1

Ufa State Aviation Technical University, Ufa, Russia^1

关键词: Active adsorption;    Fine-grained structure;    High quality coatings;    Ion-plasma coatings;    Nano scale;    Surface layers;    TiN coating;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012025/pdf
DOI  :  10.1088/1742-6596/872/1/012025

来源: IOP

【 摘 要 】

The characteristics of the quality of multi-layer vacuum ion-plasma coatings Ti-TiN such as roughness and adhesion strength are investigated. It is shown that additional ion bombardment promotes the production of high-quality coatings. Ion bombardment has a significant effect on the state of the surface layer of the metal. In the process of ion bombardment, conditions are created for the formation of active adsorption centers and the formation of a fine-grained structure, nanoscale grains and layers.