Equilibrium gas pressure in various operating modes of ion-plasma accelerators

24th International Conference on Vacuum Technique and Technology

Korolev, C.V.^1 ; Movsesyants, Yu B^1 ; Tyuryukanov, P.M.^1

All-Russian Electrotechnical Institute, Krasnokazarmennaya str. 12, Moscow

111250, Russia^1

关键词: Accelerating voltages;    Elemental compositions;    Gas equilibrium;    Gas pressures;    Gas separations;    Inhomogeneous magnetic field;    Low energy ions;    Operating modes;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/872/1/012007/pdf
DOI  :  10.1088/1742-6596/872/1/012007

来源: IOP

【 摘 要 】

The results of measurements gas equilibrium pressure and elemental composition for various operating modes of two-stage ion-plasma accelerators using a discharge in a transverse strongly inhomogeneous magnetic field are presented. It is established that the gas pressure in the chamber is most strongly changed at small ion currents to the collector. The main process of gas separation is the desorption from the surface of the electrodes under the action of low-energy ions. In steady state, with an accelerating voltage more than 1 kV, the gas pressure changes slightly. The main process is spraying.