Optical and photoelectrical properties of nanostructured thin ZnO films for UV-sensors

13th International Conference on Films and Coatings

Grigoryev, L.V.^1 ; Kulakov, S.V.^2 ; Nefedov, V.G.^2 ; Shakin, O.V.^2 ; Grigoryeva, M.L.^3 ; Moskalenko, S.D.^4

ITMO University, Saint Petersburg

197101, Russia^1

Saint-Petersburg University of Aerospace Instrumentation, Saint Petersburg

190000, Russia^2

School No 328, Saint Petersburg

192174, Russia^3

School No 197, Saint Petersburg

191123, Russia^4

关键词: Nano-structured;    Photo-electrical properties;    Photoelectric property;    Reactive ion;    UV sensor;    ZnO films;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/857/1/012011/pdf
DOI  :  10.1088/1742-6596/857/1/012011

来源: IOP

【 摘 要 】

The article presents the results investigations of the optical and photoelectric properties thin films zinc oxide obtained by the reactive ion-plasma method. It is shown that the optical and photoelectric properties of thin ZnO films has equivalent characteristics to the properties of single crystal zinc oxide and can be used to create UV-photoresistors.