Nanosurveyor 2: A Compact Instrument for Nano-Tomography at the Advanced Light Source

X-Ray Microscopy Conference 2016

Celestre, Richard^1 ; Nowrouzi, Kasra^1,2 ; Shapiro, David A.^1 ; Denes, Peter^1 ; Joseph, John M.^1 ; Schmid, Andreas^3 ; Padmore, Howard A.^1

Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley

CA

94720, United States^1

University of California, Berkeley

CA

94720, United States^2

Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley

CA

94720, United States^3

关键词: Advanced Light Source;    Charge coupled device detectors;    In-situ measurement;    Laser interferometric;    Nano-scale materials;    Positioning accuracy;    Spatial resolution;    Transmission electron;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/849/1/012047/pdf
DOI  :  10.1088/1742-6596/849/1/012047

来源: IOP

【 摘 要 】

The Advanced Light Source has developed a compact tomographic microscope based on soft x-ray ptychography for the study of nanoscale materials [1,2]. The microscope utilizes the sample manipulator mechanism from a commercial TEM coupled with laser interferometric feedback for zone plate positioning and a fast frame rate charge-coupled device detector for soft x-ray diffraction measurements. The microscope has achieved point to point (25 nm steps) scan rates of greater than 120 Hz with a positioning accuracy of better than 1 nm RMS. The instrument will enable the use of commercially available sample holders compatible with FEI transmission electron microscopes thus also allowing in-situ measurement of samples using both soft x-rays and electrons. This instrument is a refinement of a currently commissioned instrument called The Nanosurveyor, which has demonstrated resolution of better than 10 nm in two dimensions using 750 eV x-rays. Once moved to the new Coherent Scattering and Microscopy beamline it will enable spectromicroscopy and tomography of nano-materials with wavelength limited spatial resolution.