X-Ray Microscopy Conference 2016 | |
Nanosurveyor 2: A Compact Instrument for Nano-Tomography at the Advanced Light Source | |
Celestre, Richard^1 ; Nowrouzi, Kasra^1,2 ; Shapiro, David A.^1 ; Denes, Peter^1 ; Joseph, John M.^1 ; Schmid, Andreas^3 ; Padmore, Howard A.^1 | |
Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley | |
CA | |
94720, United States^1 | |
University of California, Berkeley | |
CA | |
94720, United States^2 | |
Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley | |
CA | |
94720, United States^3 | |
关键词: Advanced Light Source; Charge coupled device detectors; In-situ measurement; Laser interferometric; Nano-scale materials; Positioning accuracy; Spatial resolution; Transmission electron; | |
Others : https://iopscience.iop.org/article/10.1088/1742-6596/849/1/012047/pdf DOI : 10.1088/1742-6596/849/1/012047 |
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来源: IOP | |
【 摘 要 】
The Advanced Light Source has developed a compact tomographic microscope based on soft x-ray ptychography for the study of nanoscale materials [1,2]. The microscope utilizes the sample manipulator mechanism from a commercial TEM coupled with laser interferometric feedback for zone plate positioning and a fast frame rate charge-coupled device detector for soft x-ray diffraction measurements. The microscope has achieved point to point (25 nm steps) scan rates of greater than 120 Hz with a positioning accuracy of better than 1 nm RMS. The instrument will enable the use of commercially available sample holders compatible with FEI transmission electron microscopes thus also allowing in-situ measurement of samples using both soft x-rays and electrons. This instrument is a refinement of a currently commissioned instrument called The Nanosurveyor, which has demonstrated resolution of better than 10 nm in two dimensions using 750 eV x-rays. Once moved to the new Coherent Scattering and Microscopy beamline it will enable spectromicroscopy and tomography of nano-materials with wavelength limited spatial resolution.
【 预 览 】
Files | Size | Format | View |
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Nanosurveyor 2: A Compact Instrument for Nano-Tomography at the Advanced Light Source | 450KB | download |