Super-resolution x-ray imaging using interaction between periodic structure of object and standing wave generated with total-reflection-mirror interferometer

X-Ray Microscopy Conference 2016

Suzuki, Yoshio^1

Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo, Kashiwanoha, Kashiwa, Chiba

277-8561, Japan^1

关键词: Feasibility studies;    Interference fringe;    Projection types;    Super resolution;    Superresolution methods;    Total reflection mirrors;    Two beam interferometer;    Wave-front division interferometers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/849/1/012041/pdf
DOI  :  10.1088/1742-6596/849/1/012041

来源: IOP

【 摘 要 】

A super-resolution method in projection-type x-ray imaging is proposed. In this method, interference fringes generated with a two-beam interferometer are used for detecting the fine periodic structure of the object. When the sample has a fine periodic structure, the structure can be detected as interaction between the periodic structure of object and the standing wave formed by the two-beam interferometer. Feasibility studies have been carried out using wavefront-division interferometer with total-reflection-mirror optics and a resolution test chart as a model sample. The fine structures with a period up to 100 nm were detected as modulation of transmitting x-ray intensity at 11.5 keV.