Low-dose, high-resolution and high-efficiency ptychography at STXM beamline of SSRF

X-Ray Microscopy Conference 2016

Xu, Zijian^1 ; Wang, Chunpeng^1 ; Liu, Haigang^1 ; Tao, Xulei^1 ; Tai, Renzhong^1

Shanghai Synchrotron Radiation Facility, Shanghai Institute of Applied Physics, CAS, 239 Zhangheng Road, Shanghai

201204, China^1

关键词: Coherent diffraction imaging;    Higher efficiency;    Higher resolution;    Natural extension;    Resolution limits;    Scanning transmission x ray microscopy;    Shanghai synchrotron radiation facilities;    Spatial resolution;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/849/1/012033/pdf
DOI  :  10.1088/1742-6596/849/1/012033

来源: IOP

【 摘 要 】

Ptychography is a diffraction-based X-ray microscopy method that can image extended samples quantitatively while remove the resolution limit imposed by image-forming optical elements. As a natural extension of scanning transmission X-ray microscopy (STXM) imaging method, we developed soft X-ray ptychographic coherent diffraction imaging (PCDI) method at the STXM endstation of BL08U beamline of Shanghai Synchrotron Radiation Facility. Compared to the traditional STXM imaging, the new PCDI method has resulted in significantly lower dose, higher resolution and higher efficiency imaging in our platform. In the demonstration experiments shown here, a spatial resolution of sub-10 nm was obtained for a gold nanowires sample, which is much better than the limit resolution 30 nm of the STXM method, while the radiation dose is only 1/12 of STXM.