Ptychographic Imaging of Nano-Materials at the Advanced Light Source with the Nanosurveyor Instrument

X-Ray Microscopy Conference 2016

Shapiro, David A.^1 ; Celestre, Rich^1 ; Denes, Peter^1 ; Farmand, Maryam^1 ; Joseph, John^1 ; Kilcoyne, A.L.D.^1 ; Marchesini, Stefano^1 ; Padmore, Howard^1 ; Venkatakrishnan, Singanallur V.^1 ; Warwick, Tony^1 ; Yu, Young-Sang^1

Lawrence Berkeley National Laboratory, Berkeley

CA

94720, United States^1

关键词: Advanced Light Source;    Charge coupled device detectors;    Diffraction limited spatial resolution;    Laser interferometer;    Positioning accuracy;    Scanning mechanisms;    Soft x ray tomography;    Spatial resolution;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/849/1/012028/pdf
DOI  :  10.1088/1742-6596/849/1/012028

来源: IOP

【 摘 要 】

We present a new ptychographic x-ray microscope dedicated to soft x-ray tomography and spectromicroscopy of nano-materials at the Advanced Light Source. The microscope utilizes an ultra-stable, high performance scanning mechanism with laser interferometer feedback for sample positioning and a fast frame rate charge-coupled device detector for soft x-ray diffraction measurements. The microscope can achieve point scan rates of 120 Hz with 1 nm RMS positioning accuracy. A high performance data pipeline has been developed which enables real time ptychographic reconstructions and user-friendly operation. This instrument, called The Nanosurveyor, can achieve a spatial resolution at least 10 times finer than the x-ray spot size in both two and three dimensions with sensitivity to electronicand magnetic states of nano-materials. In this paper we demonstrate the tomographic and spectromicroscopic capability of the Nanosurveyor instrument. At high brightness x-ray sources this instrument will enable spectromicroscopy and tomography of materials with diffraction limited spatial resolution.