Effect of different methods of preliminary surface treatment and magnetron sputtering on the adhesion of Si coatings

5th International Congress on Energy Fluxes and Radiation Effects 2016

Borisov, D.P.^1 ; Slabodchikov, V.A.^1 ; Kuznetsov, V.M.^1

Tomsk State University, Tomsk

634050, Russia^1

关键词: Abrasion tests;    Adhesion properties;    Gas-discharge plasmas;    Low energy ion beam;    Research results;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/830/1/012105/pdf
DOI  :  10.1088/1742-6596/830/1/012105

来源: IOP

【 摘 要 】

The paper presents research results on the adhesion of Si coatings deposited by magnetron sputtering on NiTi substrates after preliminary surface treatment (cleaning and activation) with low-energy ion beams and gas discharge plasma. The adhesion properties of the coatings obtained by two methods are analyzed and compared using data of scratch and spherical abrasion tests.