Mass spectroscopy of the ion flux produced during inductively coupled plasma nitriding process

5th International Congress on Energy Fluxes and Radiation Effects 2016

Kolodko, D.V.^1 ; Kaziev, A.V.^1 ; Ageychenkov, D.G.^1 ; Meshcheryakova, E.A.^1 ; Pisarev, A.A.^1 ; Tumarkin, A.V.^1

National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), 31 Kashirskoe sh., Moscow

115409, Russia^1

关键词: Gas compositions;    Magnetic sectors;    Mass separators;    Mass spectroscopy;    Plasma facing;    Plasma technology;    Quadrupoles;    Total pressure;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/830/1/012064/pdf
DOI  :  10.1088/1742-6596/830/1/012064

来源: IOP

【 摘 要 】

Ion fluxes on the surface of sample embedded in inductively coupled plasma have been studied in conditions typical for titanium alloy nitriding: total pressure 0.44 Pa, Ar/N2= 70%/30%, and RF power 1500 W. The gas composition was independently monitored by the quadrupole analyser. The ion fluxes were sampled using a specially designed electrostatic extractor and then analysed with a magnetic sector mass-separator. The extractor design allowed us to apply a bias voltage to the plasma facing electrode thus imitating interaction of ions with the surface during the plasma processing. The ion fluxes of Ar+, , and N+on the surface were measured. The mass spectroscopy diagnostics unit is suitable for extensive ion content studies in the plasma technology facilities.