Titanium nitride plasma-chemical synthesis with titanium tetrachloride raw material in the DC plasma-arc reactor

14th High-Tech Plasma Processes Conference

Kirpichev, D.E.^1 ; Sinaiskiy, M.A.^1 ; Samokhin, A.V.^1 ; Alexeev, N.V.^1

A.A. Baikov Institute of Metallurgy and Material Science, Leninskiy av., 49, Moscow, Russia^1

关键词: Chemical compositions;    DC plasma;    Plasma jet enthalpy;    Plasmatrons;    Plasmochemical synthesis;    Synthesis process;    Thermo dynamic analysis;    Titanium tetrachlorides;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/825/1/012006/pdf
DOI  :  10.1088/1742-6596/825/1/012006

来源: IOP

【 摘 要 】

The possibility of plasmochemical synthesis of titanium nitride is demonstrated in the paper. Results of the thermodynamic analysis of TiCl4- H2- N2system are presented; key parameters of TiN synthesis process are calculated. The influence of parameters of plasma-chemical titanium nitride synthesis process in the reactor with an arc plasmatron on characteristics on the produced powders is experimentally investigated. Structure, chemical composition and morphology dependencies on plasma jet enthalpy, stoichiometric excess of hydrogen and nitrogen in a plasma jet are determined.