Substrate temperature effects on the structure and properties of ZnMnO films prepared by pulsed laser deposition

8th International Congress of Engineering Physics

物理学;工业技术

Riascos, H.^1 ; Duque, J.S.^1 ; Orozco, S.^1

Plasma, Láser y Aplicaciones, Universidad Tecnológica de Pereira, Pereira, Colombia^1

关键词: C-axis orientations;    Hexagonal wurtzite structure;    Pulsed Nd:YAG laser;    Structural and optical properties;    Structure and properties;    Substrate temperature;    Substrate temperature effect;    UV-vis spectroscopy;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/792/1/012058/pdf
DOI  :  10.1088/1742-6596/792/1/012058

学科分类：工业工程学

来源: IOP

【 摘 要 】

ZnMnO thin films were grown on silicon substrates by pulsed laser deposition (PLD). Pulsed Nd:YAG laser was operated at a wavelength of 1064 nm and 100 mJ. ZnMnO thin films were deposited at the vacuum pressure of 10-5Torr and with substrate temperature from room temperature to 600 °C. The effects of substrate temperature on the structural and Optical properties of ZnMnO thin films have been investigated by X-ray diffraction (XRD), Raman spectroscopy and Uv-vis spectroscopy. From XRD data of the samples, it can be showed that temperature substrate does not change the orientation of ZnMnO thin films. All the films prepared have a hexagonal wurtzite structure, with a dominant (002) peak around 2θ=34.44° and grow mainly along the c-axis orientation. The substrate temperature improved the crystallinity of the deposited films. Uv-vis analysis showed that, the thin films exhibit high transmittance and low absorbance in the visible region. It was found that the energy band to 300 ° C is 3.2 eV, whereas for other temperatures the values were lower. Raman reveals the crystal quality of ZnMnO thin films.