Simulation of rarefied low pressure RF plasma flow around the sample

8th All-Russian Conference on Low Temperature Plasma in the Processes of Functional Coating Preparation

Zheltukhin, V.S.^1 ; Shemakhin, A. Yu^2

Kazan National Research Technological University, Kazan, Russia^1

Kazan Federal University, Kazan, Russia^2

关键词: Charged components;    Degree of ionization;    Initial and boundary conditions;    Plasma parameter;    Program language;    Radio frequency plasma;    Thermal equations;    Vacuum chambers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/789/1/012071/pdf
DOI  :  10.1088/1742-6596/789/1/012071

来源: IOP

【 摘 要 】

The paper describes a mathematical model of the flow of radio frequency plasma at low pressure. The hybrid mathematical model includes the Boltzmann equation for the neutral component of the RF plasma, the continuity and the thermal equations for the charged component. Initial and boundary conditions for the corresponding equations are described. The electron temperature in the calculations is 1-4 eV, atoms temperature in the plasma clot is (3-4) • 103K, in the plasma jet is (3.2-10) • 102K, the degree of ionization is 10-7-10-5, electron density is 1015-1019m-3. For calculations plasma parameters is developed soft package on C++ program language, that uses the OpenFOAM library package. Simulations for the vacuum chamber in the presence of a sample and the free jet flow were carried out.