Electrical discharges with liquid electrodes in optical materials processing

8th All-Russian Conference on Low Temperature Plasma in the Processes of Functional Coating Preparation

Mirkhanov, D.N.^1 ; Gaisin, Al F.^1

Faculty of Physics and Mathematics, Kazan National Research Technical University Named after A.N. Tupolev - KAI, Kazan

420111, Russia^1

关键词: Electrical discharges;    Experimental research;    High frequency HF;    Liquid electrodes;    Materials processing;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/789/1/012034/pdf
DOI  :  10.1088/1742-6596/789/1/012034

来源: IOP

【 摘 要 】

In this work the experimental research of high frequency capacitive electric discharge in the processing of semiconductor material surface is presented.