Peculiarities of the structure formation of nanoscale coatings from the vacuum arc discharge plasma

8th All-Russian Conference on Low Temperature Plasma in the Processes of Functional Coating Preparation

Kostrin, D.K.^1 ; Pikus, M.I.^1 ; Smirnov, E.A.^1 ; Lisenkov, A.A.^2

Department of Electronic Instruments and Devices, Saint Petersburg Electrotechnical University LETI, Saint-Petersburg

197376, Russia^1

Institute of Problems of Mechanical Engineering, Russian Academy of Sciences, Saint-Petersburg

199178, Russia^2

关键词: Nano-scale coatings;    Structure formations;    Ti-Al-N;    Vacuum arc discharges;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/789/1/012030/pdf
DOI  :  10.1088/1742-6596/789/1/012030

来源: IOP

【 摘 要 】

In this paper features of the structure formation of nanoscale coatings (TiN)-(AlN)- (Ti-Al-N) in the vacuum arc discharge plasma are considered. The composition and structure of the formed nanoscale coatings are studied. The main factors influencing the quality of the formed coatings are shown.