Improving of stability of the volumetric glow discharge in the gas flow

8th All-Russian Conference on Low Temperature Plasma in the Processes of Functional Coating Preparation

Galeev, I.G.^1 ; Asadullin, T. Ya^1

Kazan National Research Technical University Named by A.N. Tupolev, 10, K. Marx str., Kazan

420111, Russia^1

关键词: Cathode potential;    Cathode region;    Discharge chamber;    Thermal ionization;    Working gas;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/789/1/012012/pdf
DOI  :  10.1088/1742-6596/789/1/012012

来源: IOP

【 摘 要 】

The paper discusses a method of increasing the volumetric stability of the glow discharge in the flow of a working gas by reducing the normal current density at the cathode due to the injection of the inert additional gas in the near-electrode region of the discharge chamber. In this case a relatively thin near-cathode region of the discharge chamber is filled by additional gas but the main region contains only working gas. The additional gas is chosen by way that its value of the cathode potential fall is less one for the working gas but its value of thermal conductivity is more in contrast. Then the conditions for the occurrence of thermal-ionization instability are decreased and the stability of the volumetric glow discharge respectively increases.