Recent improvements on micro-thermocouple based SThM

Eurotherm Seminar No 108 - Nanoscale and Microscale Heat Transfer V

Nguyen, T.P.^1 ; Thiery, L.^1 ; Teyssieux, D.^1 ; Briand, D.^2 ; Vairac, P.^1

FEMTO-ST (UMR 6174), Université de Bourgogne Franche-Comté, CNRS, ENSMM, 15B avenue des Montboucons, Besançon

F-25030, France^1

Sensors, Actuators and Microsystems Laboratory, EPFL, Neuchâtel, Switzerland^2

关键词: Contact strength;    Force detection;    Micro thermocouples;    Quartz tuning fork;    Scanning thermal microscope;    Thermal measurement systems;    Thermocouple probes;    Versatile tools;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/785/1/012005/pdf
DOI  :  10.1088/1742-6596/785/1/012005

来源: IOP

【 摘 要 】

The scanning thermal microscope (SThM) has become a versatile tool for local surface temperature mapping or measuring thermal properties of solid materials. In this article, we present recent improvements in a SThM system, based on a micro-wire thermocouple probe associated with a quartz tuning fork for contact strength detection. Some results obtained on an electrothermal micro-hotplate device, operated in active and passive modes, allow demonstrating its performance as a coupled force detection and thermal measurement system.