Numerical and experimental study of a warming up effect of an underexpanded rarefied rf plasma jet outflowing into a flooded area

31st International Conference on Equations of State for Matter

Shemakhin, A.Yu.^1 ; Zheltukhin, V.S.^2 ; Khubatkhuzin, A.A.^2

Kazan Federal University, Kremlyovskaya 18, Kazan, Tatarstan

420008, Russia^1

Kazan National Research Technological University, Karl Marx Street 68, Kazan, Tatarstan

420015, Russia^2

关键词: Continuum Modeling;    Flow calculations;    Nozzle pressure ratio;    Numerical and experimental study;    Numerical results;    Statistical approach;    Transition regimes;    Undisturbed flows;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/774/1/012167/pdf
DOI  :  10.1088/1742-6596/774/1/012167

来源: IOP

【 摘 要 】

A mathematical model of the rf plasma flow at 13.3-133 Pa in transition regime at Knudsen number values 8 × 10-3≤ Kn ≤ 7 × 10-2and the nozzle pressure ratio n = 10 for the carrier gas is described. The model based on both the statistical approach to the neutral component of the rf plasma and the approach to the continuum model for electron and ion components. The results of plasma flow calculations performed both for an undisturbed flow and for the stream with a sample at a prescribed electric field are described. The effect of a warming up of a stream in a mixture zone confirmed by comparison of numerical results with experimental ones is found.