Combinatorial approach to MgHf co-doped AlN thin films for Vibrational Energy Harvesters

16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Nguyen, H.H.^1 ; Oguchi, H.^2 ; Kuwano, H.^1

Department of Robotics, Tohoku University, Sendai, Japan^1

AIMR, Tohoku University, Sendai, Japan^2

关键词: Combinatorial approach;    Composition gradient;    Energy dispersive spectroscopies (EDS);    Piezoelectric coefficient;    Si (100) substrate;    Two-dimensional detectors;    Vibrational energies;    X ray diffractometers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/773/1/012075/pdf
DOI  :  10.1088/1742-6596/773/1/012075

来源: IOP

【 摘 要 】

In this report, we studied MgHf co-doped AlN ((Mg,Hf)xA11-xN) aiming for developing an AlN-based dielectric material with the large piezoelectric coefficient. To rapidly screen the wide range of composition, we applied combinatorial film growth approach. To get continuous composition gradient on a single substrate, films were deposited on Si (100) substrates by sputtering AlN and Mg-Hf targets simultaneously. Crystal structure was investigated by X-ray diffractometer equipped with a two-dimensional detector (2D-XRD). Composition was determined by Energy Dispersive Spectroscopy (EDS). These studies revealed that we successfully covered the widest ever composition range of 0