Vibrational micro-energy harvesters utilizing Nb-doped Pb(Zr,Ti)O3 films on stainless steel substrates

16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications

物理学;能源学

Van Minh, L.^1 ; Sano, T.^2 ; Fujii, T.^2 ; Kuwano, H.^1

Graduate School of Engineering, Tohoku University, Sendai, Japan^1

Fujifilm Corp., 577 Ushijima, Kaisei-machi, Kanagawa

258-877, Japan^2

关键词: Energy Harvester;    Metallic substrate;    Micro energy harvesters;    Micro-machined;    Piezoelectric coefficient;    Power densities;    Preferred orientations;    Stainless steel substrates;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/773/1/012003/pdf
DOI  :  10.1088/1742-6596/773/1/012003

来源: IOP

【 摘 要 】

This work presents the micromachined energy harvesters using Nb-doped Pb(Zr,Ti)O3(PNZT) films grown directly on the stainless steel substrates (SUS430). Piezoelectric materials on metallic substrates have been attracted to practical and robust energy harvesters. Nb-doped PZT films with (001)-preferred orientation grown on SUS substrates provided excellent properties for energy harvesting - high piezoelectric coefficient (e31= -10.6 C/m2) and low dielectric permittivity (r= 373). The PNZT-based micro-energy harvester comprising a cantilever of 1.7 mm× 5 mm × 0.05 mm and a proof mass of 3 mm× 5 mm × 47 mm achieved the normalized power density (NPD) of 2.87 mW.g-2.cm-3. It is the highest performance among the published SUS-based energy harvesters, being closer to the best Si- based energy harvesters.