Location Dependence of a MEMS Electromagnetic Transducer with respect to an AC Power Source

27th Micromechanics and Microsystems Europe Workshop

物理学;力学

Houlihan, Ruth^1 ; Olszewski, Oskar^1 ; Waldron, Finbarr^1 ; O'Neill, Mike^1 ; Mathewson, Alan^1 ; Jackson, Nathan^1

Tyndall National Institute, Lee Maltings, Cork, Ireland^1

关键词: Alternating electromagnetic field;    Cantilever oscillation;    Cantilever structures;    Electrical transduction;    Electromagnetic forces;    Electromagnetic transducer;    Piezoelectric layers;    Silicon-based devices;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/757/1/012041/pdf
DOI  :  10.1088/1742-6596/757/1/012041

学科分类：力学，机械学

来源: IOP

【 摘 要 】

A MEMS, silicon based device with a piezoelectric layer and an integrated magnet is presented for magnetic to electrical transduction. The cantilever structure can be configured either as an energy harvester to harvest power from an AC power line or as an AC current sensor. The positioning of the transducer with respect to the AC conductor is critical in both scenarios. For the energy scavenger, correct positioning is required to optimize the harvested power. For the current sensor, it is necessary to optimise the sensitivity of the sensor. This paper considers the effect of the relative position of the transducer with respect to the wire on the resulting electromagnetic forces and torques driving the device. It is shown here that the magnetic torque acting on a cantilever beam with an integrated magnet and in the vicinity of an alternating electromagnetic field is a very significant driver of the cantilever oscillations.