Integrated CoPtP Permanent Magnets for MEMS Electromagnetic Energy Harvesting Applications

27th Micromechanics and Microsystems Europe Workshop

物理学;力学

Mallick, Dhiman^1 ; Roy, Saibal^1

Micro-Nano-Systems Center, Tyndall National Institute, Cork, Ireland^1

关键词: Deposited films;    Electromagnetic vibrations;    Hard magnetic material;    Hard magnetic property;    MEMS applications;    Out-of plane;    Plated films;    Stress free;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/757/1/012034/pdf
DOI  :  10.1088/1742-6596/757/1/012034

学科分类：力学，机械学

来源: IOP

【 摘 要 】

This work reports the development of integrated Co rich CoPtP hard magnetic material for MEMS applications such as Electromagnetic Vibration Energy Harvesting. We report a new method of electrodeposition compared to the conventional DC plating, involving a combination of forward and reverse pulses for optimized deposition of Co rich CoPtP hard magnetic material. This results in significant improvements in the microstructure of the developed films as the pulse reverse plated films are smooth, stress free and uniform. Such improvements in the structural properties are reflected in the hard magnetic properties of the material as well. The intrinsic coercivities of the pulse reverse deposited film are more than 6 times higher for both in-plane and out-of-plane measurement directions and the squareness of the hysteresis loops also improve due to the similar reasons.