Geometric optimization of magnetically actuated MEMS micromirrors

27th Micromechanics and Microsystems Europe Workshop

物理学;力学

Pieri, Francesco^1

Dipartimento di Ingegneria dell'Informazione, Università di Pisa, Pisa, Italy^1

关键词: Deflection angles;    Driving current;    Geometric optimization;    Linear objective functions;    Quantitative design;    Resonance characteristic;    Resonance frequencies;    Self-consistent equations;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/757/1/012030/pdf
DOI  :  10.1088/1742-6596/757/1/012030

学科分类：力学，机械学

来源: IOP

【 摘 要 】

In this paper we develop a set of self-consistent equations describing the static and resonance characteristics of a rectangular micromirror actuated by driving a current into a multicoil inductor fabricated on the micromirror surface. Under fairly general assumptions, these equations can be solved analytically for the most common design targets, such as the driving current, deflection angle, resonance frequency, and overall dimensions. We use this solutions to optimize the micromirror geometry by minimization of a linear objective function. The tradeoffs that emerge from optimization data allow simple quantitative design of low current, low size mirrors.