Diagnostics of a low-pressure ICP discharge using a magnetic sector mass analyser

2nd Conference on Plasma & Laser Research and Technologies

Kolodko, D.V.^1 ; Kaziev, A.V.^1 ; Ageychenkov, D.G.^1 ; Pisarev, A.A.^1

National Research Nuclear University MEPhI, Moscow Engineering Physics Institute, 31 Kashirskoe highway, Moscow

115409, Russia^1

关键词: Extraction systems;    Ion content;    Ion fluxes;    Low pressures;    Magnetic sectors;    Mass resolution;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/747/1/012018/pdf
DOI  :  10.1088/1742-6596/747/1/012018

来源: IOP

【 摘 要 】

A simple magnetic sector mass analyser with an extraction system has been tested as a tool for monitoring ion contents in a low-pressure inductively coupled plasma in Ar, N2, and their mixtures. The spectrometer demonstrated mass-resolution suitable for ion flux analyses in plasmas of various compositions. The capabilities of the mass analyser are discussed.