会议论文详细信息
International Conference of Young Scientists and Specialists "Optics-2015" | |
Changes in spectral characteristics of thin molybdenum films with atmospheric annealing | |
Paranin, V.D.^1 | |
Samara State Aerospace University, Moskovskoe shosse 34, Samara | |
443086, Russia^1 | |
关键词: Absorption maxima; Annealing time; Molybdenum films; Optical characteristics; Sample surface; Spectral characteristics; Spectral transmission; | |
Others : https://iopscience.iop.org/article/10.1088/1742-6596/735/1/012058/pdf DOI : 10.1088/1742-6596/735/1/012058 |
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来源: IOP | |
【 摘 要 】
In this work the spectral transmission, reflection and absorption of molybdenum films with 35 nanometers thick are investigated. It is established that atmospheric annealing at 600 degrees considerably changes optical characteristics of films. At annealing time of 1 min. the absorption maximum on the wavelength of 532 nanometers is observed. At annealing time more than 1 min. the monotonous increase of scattering caused by increase in a roughness of a sample surface is noted. The studied effects allow to increase resolution of laser record of microstructures.
【 预 览 】
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