Mass transfer in ablation process with large angle of laser ray incidence on target and small distance between target and substrate

23rd International Conference on Vacuum Technique and Technology

Lozovan, A.A.^1 ; Prishepov, S.V.^1 ; Frangulov, S.V.^1 ; Aleksandrova, S.S.^1 ; Rizakhanov, R.N.^2 ; Sigalayev, S.K.^2

Moscow Aviation Institute, National Research University, ul. Orshanskaya 3, Moscow

121552, Russia^1

Keldysh Research Center, ul. Onegskaya 8, Moscow

125438, Russia^2

关键词: Ablated materials;    Distance between target and substrates;    Incidence angles;    Periodic waves;    Shaped structures;    Spatial restrictions;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/729/1/012024/pdf
DOI  :  10.1088/1742-6596/729/1/012024

来源: IOP

【 摘 要 】

This paper presents the results of research of laser ablation, carried out at 85° incidence angle of the laser ray to the normal to surface of target with simultaneous spatial restriction of plasma torch. It is shown that laser radiation reflected from the target falls on the substrate and produces ablation. Consequently ablated material of the substrate is transferred to the target. It is found, that direct and reflected from the target laser radiation form periodic wave-shaped structures on the surface of target and substrate.