Method of magnetron target temperature evaluation by analysis of thermal radiation spectrum

23rd International Conference on Vacuum Technique and Technology

Gerasimov, V.A.^1 ; Kostrin, D.K.^1 ; Selivanov, L.M.^1 ; Uhov, A.A.^1 ; Komlev, A.E.^1 ; Shutova, E.S.^1

St. Petersburg Electrotechnical University LETI, St. Petersburg

197376, Russia^1

关键词: Black body radiation;    Gas discharge;    Minimal points;    Target temperature;    Thermal radiation spectra;    Vacuum chambers;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/729/1/012019/pdf
DOI  :  10.1088/1742-6596/729/1/012019

来源: IOP

【 摘 要 】

A method of vacuum chamber magnetron target temperature evaluation by measurement of aggregated spectrum of gas discharge emission and target thermal radiation is proposed. Method is based on matching of calculated black body radiation spectrum with given temperature and the minimal points on the measured spectrum.