Magnetron sputtering in rigid optical solar reflectors production

23rd International Conference on Vacuum Technique and Technology

Asainov, O.Kh.^1 ; Bainov, D.D.^1 ; Krivobokov, V.P.^1 ; Sidelev, D.V.^1

Tomsk Polytechnic University, Tomsk, Russia^1

关键词: Absorption co-efficient;    Glass substrates;    Indium tin oxide;    Optical solar reflectors;    Plasma methods;    Silver film;    Uniform deposition;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/729/1/012012/pdf
DOI  :  10.1088/1742-6596/729/1/012012

来源: IOP

【 摘 要 】

Magnetron sputtering was applied to meet the growing need for glass optical solar reflectors. This plasma method provided more uniform deposition of the silver based coating on glass substrates resulted in decrease of defective reflectors fraction down to 5%. For instance, such parameter of resistive evaporation was of 30%. Silver film adhesion to glass substrate was enhanced with indium tin oxide sublayer. Sunlight absorption coefficient of these rigid reflectors was 0.081-0.083.