Collisional electron spectroscopy method for gas analysis

5th International Workshop & Summer School on Plasma Physics 2012

Stefanova, M.S.^1 ; Pramatarov, P.M.^1 ; Kudryavtsev, A.A.^2 ; Peyeva, R.A.^1 ; Patrikov, T.B.^1

Institute of Solid State Physics, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee blvd., Sofia

1784, Bulgaria^1

St.Petersburg State University, 7-9 Universitetskaya nab, St.Petersburg

199034, Russia^2

关键词: Characteristic energy;    Detection and identifications;    Discharge volume;    Electron energy spectrum;    Helium metastable atoms;    Impurity particles;    Nonlocal fast electrons;    Penning ionization;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/715/1/012010/pdf
DOI  :  10.1088/1742-6596/715/1/012010

来源: IOP

【 摘 要 】

Recently developed collisional electron spectroscopy (CES) method, based on identification of gas impurities by registration of groups of nonlocal fast electrons released by Penning ionization of the impurity particles by helium metastable atoms, is verified experimentally. Detection and identification of atoms and molecules of gas impurities in helium at pressures of 14 - 90 Torr with small admixtures of Ar, Kr, CO2, and N2 are carried out. The nonlocal negative glow plasma of short dc microdischarge is used as most suitable medium. Records of the energy spectra of penning electrons are performed by means of an additional electrode - sensor, located at the boundary of the discharge volume. Maxima appear in the electron energy spectra at the characteristic energies corresponding to Penning ionization of the impurity particles by helium metastable atoms.