Batch Production of Micron-scale Backlighter Targets

5th Target Fabrication Workshop

Arthur, G.^1

Scitech Precision Ltd, Rutherford Appleton Laboratory, Harwell Oxford, Oxon-Chilton

OX11 0QX, United Kingdom^1

关键词: Batch production;    Conventional machining;    Etching process;    Fabrication technique;    Laser targets;    Microelectromechanical system (MEMS);    Micron scale;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/713/1/012001/pdf
DOI  :  10.1088/1742-6596/713/1/012001

来源: IOP

【 摘 要 】

The fabrication of micron-scale backlighter targets is described. Traditionally laser targets have been fabricated using conventional machining or coarse etching processes and have been produced in quantities of 10s to low 100s. The processes described herein allow batch production with numbers in the 1000s. In addition, the Micro-Electro-Mechanical System (MEMS) fabrication techniques used allow much finer tolerances and more accurate placement of the various components relative to each other.