Grazing incidence X-ray absorption characterization of amorphous Zn-Sn-O thin film

16th International Conference on X-ray Absorption Fine Structure

Moffitt, S.L.^1 ; Ma, Q.^2 ; Buchholz, D.B.^1 ; Chang, R.P.H.^1 ; Bedzyk, M.J.^1 ; Mason, T.O.^1

Department of Materials Science and Engineering, Northwestern University, Evanston

IL

60208, United States^1

DND-CAT, Northwestern Synchrotron Research Center at Advanced Photon Source, Argonne

IL

60439, United States^2

关键词: Coordination number;    Critical angles;    Grazing incidence;    Grazing incidence x-ray absorption spectroscopies;    Local structure;    Total external reflection;    Transparent conducting films;    Zn doping;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/712/1/012116/pdf
DOI  :  10.1088/1742-6596/712/1/012116

来源: IOP

【 摘 要 】

We report a surface structure study of an amorphous Zn-Sn-O (a-ZTO) transparent conducting film using the grazing incidence X-ray absorption spectroscopy technique. By setting the measuring angles far below the critical angle at which the total external reflection occurs, the details of the surface structure of a film or bulk can be successfully accessed. The results show that unlike in the film where Zn is severely under coordinated (N