Magnetron sputtered WS2; optical and structural analysis

International Physics Conference at the Anatolian Peak 2016

Koçak, Y.^1 ; Akaltun, Y.^2 ; Gür, Emre^1

Department of Physics, Faculty of Science, Atatürk University, Erzurum

25240, Turkey^1

Department of Electric Electronic Engineering, Erzincan, Turkey^2

关键词: Different substrates;    Electronic and optical properties;    Optical and electrical properties;    Out-of plane;    Polycrystalline;    Preferential sputtering;    Radio-frequency-magnetron sputtering;    XRD analysis;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/707/1/012028/pdf
DOI  :  10.1088/1742-6596/707/1/012028

来源: IOP

【 摘 要 】

Remarkable properties of graphene have renewed interest in inorganic, Transition Metal Dichalgogenits (TMDC) due to unique electronic and optical properties. TMDCs such as MoS2, MoSe2, WS2and WSe2have sizable bandgaps that change from indirect to direct in single layers, allowing applications such as solar cells, transistors, photodetectors and electroluminescent devices in which the graphene is not actively used. So, fabrication and analysis of these films are important for new generation devices. In this work, polycrystalline WS2films were grown by radio frequency magnetron sputtering (RFMS) on different substrates like n-Si(100), n-Si(111), p-Si(100), glass and fused silica. Structural, morphological, optical and electrical properties were investigated as a function of film thickness and RF power. From XRD analysis, signals from planes of (002), (100), (101), (110), (008) belong to the hegzagonal WS2were obtained. Raman spectra of the WS2show that there are two dominant peaks at ∼351 cm-1(in-plane phonon mode) and ∼417 cm-1(out-of-plane phonon mode). XPS analysis of the films has shown that binding energy and the intensity of tungsten 4f shells shifts by depending on the depth of the films which might be due to the wellknown preferential sputtering.