Optical and electrical properties of nanolaminate dielectric structures

19th International Summer School on Vacuum, Electron and Ion Technologies

Dikov, Hr^1 ; Vitanov, P.^2 ; Ivanova, T.^2 ; Stavrov, V.^2

Central Laboratory of Solar Energy and New Energy Sources, Bulgarian Academy of Sciences, 72 Tzarigradsko Chaussee, Sofia

1784, Bulgaria^1

AMG Technology Ltd., Microelectronica Ind. Zone, Botevgrad

2140, Bulgaria^2

关键词: Dielectric structure;    Electrical conductivity;    Low- temperature process;    Magnetron sputtering systems;    Nanolaminate structures;    Optical and electrical properties;    Transparent conductive;    Visible spectral range;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/700/1/012054/pdf
DOI  :  10.1088/1742-6596/700/1/012054

来源: IOP

【 摘 要 】

The aim of this study was formation of a multilayered transparent conductive nanolaminate structure with optimized conductivity vs. transparency parameters. The nanolayered structure comprised one or two thin layers of dielectric materials. The overall electrical conductivity was modified by tuning the size of the planar metal granules. Magnetron sputtering system with three different targets was used for layers deposition. The advantages are: the good reproducibility of a low-temperature process allows for effective process control and, optionally, selective formation of conductive areas in a dielectric structure. Our studies revealed that the relation between the sheet resistance and the maximum transparency in the visible spectral range depends on the size of the metal granules and the film thickness of the dielectric coating. The technology provides transparent conductive coatings with well-controlled optical and electrical properties.