Features of formation concentration profile in structured materials

7th Conference on Low temperature Plasma in the Processes of Functional Coating Preparation

Pavlenko, T.S.^1 ; Lisenkov, A.A.^1 ; Babinov, N.A.^1

Department of Electronic Instruments and Devices, Saint Petersburg State Electrotechnical University Them. Ulyanov (Lenin) LETI, St. Petersburg

197376, Russia^1

关键词: Concentration profiles;    Diffusion process;    Fine grained;    Fine grains;    Heterogeneous composition;    Radiation-induced diffusion;    Structured materials;    Three component;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/669/1/012039/pdf
DOI  :  10.1088/1742-6596/669/1/012039

来源: IOP

【 摘 要 】

The paper presents analysis of dependence of the penetration depth of the implanted aluminium ions in structured titanium. Ion implantation was performed repetitively pulsed particle beam ion source "MEVVA-V.RU". In the interpretation of the observed patterns of energy accounted for heterogeneous composition of the beam vacuum-arc source, is represented by three components. Within the simulation found that in samples with relatively fine grains (ultrafine samples) largely contribute to diffusion processes, in particular radiation- induced diffusion in comparison with fine-grained samples.